A 200kV transmission electron microscope from JEOL (Peabody, MA) delivers nanoanalysis for process and quality control of mass-produced semiconductor and materials samples. The multi-function JEOL JEM-2800 features high resolution imaging in TEM, STEM, and SE modes; ultrasensitive elemental mapping with a large angle Energy Dispersive Spectrometer (EDS); Electron Energy Loss Spectroscopy (EELS) for chemical analysis; critical dimension analysis; tomography; and in situ observation of samples. The TEM functions without use of the traditional fluorescent screen on the electron column. The JEM-2800 speeds specimen observation through automatic functions including adjustment of focus, astigmatism, contrast, brightness, crystal zone axis alignment, and height. The JEM-2800 has an operator navigation system and on-screen operating guide. Additional features and key specifications of the JEM-2800 include a Schottky field-emission electron gun; stable eucentric side-entry goniometer stage; a magnification range of 100x to 150,000,000x using STEM; 0.1nm TEM resolution; and 0.20nm BF/DF STEM resolution.
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