A report discusses the difficulty of measuring scattering properties of coated mirrors extremely close to the specular reflection peak. A prototype Optical Hetero - dyne Near-angle Scatterometer (OHNS) was developed. Light from a long-coherence- length (>150 m) 532-nm laser is split into two arms. Acousto-optic modulators frequency shift the sample and reference beams, establishing a fixed beat frequency between the beams. The sample beam is directed at very high f/# onto a mirror sample, and the point spread function (PSF) formed after the mirror sample is scanned with a pinhole. This light is recombined by a non-polarizing beam splitter and measured through heterodyne detection with a spectrum analyzer. Polarizers control the illuminated and analyzed polarization states, allowing the polarization dependent scatter to be measured.

The bidirectional reflective or scattering distribution function is normally measured through use of a scattering goniometer instrument. The instrumental beam width (collection angle span) over which the scatterometer responds is typically many degrees. The OHNS enables measurement at angles as small as the first Airy disk diameter.

This work was done by Steven A. Macenka of Caltech and Russell A. Chipman, Brian J. Daugherty, and Stephen C. McClain of the University of Arizona for NASA’s Jet Propulsion Laboratory.

This invention is owned by NASA, and a patent application has been filed. Inquiries concerning nonexclusive or exclusive license for its commercial development should be addressed to the Patent Counsel, NASA Management Office–JPL. NPO-47310