Enabling High Tech with Plasma-Based Computer Chips

Plasmas are essential to the manufacturing process of computer chips. Get a glimpse into how these low temperature plasmas are used in fabricating microelectronics on a large scale.

"In recent years, some of the most important innovations in plasma processing, plasma etching, and plasma deposition, has been the introduction of pulse plasma processes," said Dr. Richard Gottscho, Chief Technology Officer of Lam Research. "If I pulse the plasma, I can control how much time I expose the wafer to iron flux."