Microelectromechanical systems (MEMS) are fundamentally driven by multiphysics phenomena, and as such, they require a modeling approach where the relevant physical phenomena are included and coupled. Join Dr. James Ransley from Veryst Engineering for a demonstration of how to use multiphysics modeling for these systems.
In the presentation, he will discuss the tools required to model a wide range of sensors and transducers. Effects covered include electromechanical couplings, thin-film damping, thermoelastic damping, and anchor losses.
A live demo in the COMSOL Multiphysics® software will show how to model a MEMS scanning mirror for a lidar use case. A Q&A session will conclude the webinar.