White Paper: Robotics, Automation & Control

Nanoprecision Sensor Technology in Semiconductor Manufacturing


In order to make chips ever more compact and to fit even more functionality into the smallest possible space, all production steps in wafer manufacturing are subject to the most stringent demands. This requires sensors that reliably monitor and control handling systems, machine parts, optics and the associated processes.

Micro-Epsilon is a reliable partner of the semiconductor industry. Decades of experience and cooperation with leading companies in the semiconductor industry enable us to offer the right solution for the measurement task at hand and to develop customized sensors if required. Our high-precision sensors and measuring systems are designed and built based on semiconductor-compliant manufacturing technologies and suitable materials. Therefore, they are ideally suited for use in vacuums and ultra-high vacuums.

This paper shows application examples of high-performance sensors in various process steps and application areas.

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