Snapshot SEM Imaging of Moving MEMS Structures

A stroboscopic scanning electron microscope (SEM) has been proposed as a means of generating still or slow-motion pictures of moving structures in microelectromechanical systems (MEMS). Such...

Temporary Fullerene Films in Microelectromechanical Devices

In a proposed technique for fabrication of microelectromechanical devices, thin films of fullerenes would be used as temporary packaging to protect and position delicate...

Normally Closed, Piezoelectrically Actuated Microvalve

A normally closed, piezoelectrically actuated microvalve is being developed as a prototype of valves in microfluidic systems and other microelectromechanical systems (MEMS) intended for...

Better Packaging for Miniature Immersible Diagnostic Systems

A method of packaging now under development would afford improved protection and functionality for miniature immersible diagnostic systems (MIDS). The method involves covering a...

Scanning Probe Position Encoder Yields Subnanometer Precision

In today's manufacturing world, the need for ultraprecise position measurement and control grows as feature sizes shrink in the semiconductor industry and the world of...

Microelectromechanical SPDT Switches

Microelectromechanical single-pole, double-throw (SPDT) switches with predominantly planar configurations have been proposed for use in radio-frequency (RF) circuits. These switches would have overall...

Fabricating Diamond Membranes Using Reactive-Ion Etching

A process for the fabrication of a polycrystalline diamond membrane involves chemical vapor deposition (CVD) of diamond onto a silicon substrate, followed by conventional...

Surface Micromachining of Diamond for Fabrication of MEMS Microstructures

A surface-micromachining process has been devised for use in fabricating microscopic polycrystalline diamond structures (e.g., bridges and cantilevers) as integral...

Dual-Function Microelectronic Sensors

Integrated-circuit image sensors of a proposed type would be capable of operation in either the wavelength band of 0.5 to 2.5 *m, the wavelength band of 2.8 to 5.8 *m, or both bands simultaneously....

Micromachined Force-Balance Anemometer

A micromachined force-balance anemometer has been developed by modifying the design of a micromachined force-balance accelerometer that responds to accelerations as small as 10⁹ × normal...

Micromachined Magnetostatic Switches

Magnetostatic switches — switches that open or close in response to magnetic fields — are being developed and fabricated using micromachining (MEMS) technology. These switches operate similarly to...

Active Fiber Optic Microelectromechanical Systems Aligner

As currently practiced, packaging of individual optoelectronic components accounts for 40-50 percent of product cost. The development of higher-volume, lower-cost optoelectronic...

Miniature Multispeed Transmissions for Small Motors

A design has been developed for manufacturing multispeed transmissions that are small enough to be used with minimotors - electromagnetic motors with power ratings of less than 1 W. Like...

Highly Selective Gas-Phase Etching of Silicon

A technique of gentle, highly selective gas-phase etching of silicon has been devised to enable the fabrication of microelectromechanical devices integrated with electronic circuits. For...