Keyword: Microelectromechanical devices

Briefs: Photonics/Optics

A stroboscopic scanning electron microscope (SEM) has been proposed as a means of generating still or slow-motion pictures of moving structures in microelectromechanical systems (MEMS). Such...

Briefs: Motion Control

In a proposed technique for fabrication of microelectromechanical devices, thin films of fullerenes would be used as temporary packaging to protect and position delicate...

Briefs: Mechanical & Fluid Systems

A normally closed, piezoelectrically actuated microvalve is being developed as a prototype of valves in microfluidic systems and other microelectromechanical systems (MEMS) intended for...

Briefs: Materials

A method of packaging now under development would afford improved protection and functionality for miniature immersible diagnostic systems (MIDS). The method involves covering a...

Briefs: Electronics & Computers

In today's manufacturing world, the need for ultraprecise position measurement and control grows as feature sizes shrink in the semiconductor industry and the world of...

Briefs: Electronics & Computers

Microelectromechanical single-pole, double-throw (SPDT) switches with predominantly planar configurations have been proposed for use in radio-frequency (RF) circuits. These switches would have overall...

Briefs: Test & Measurement
Electromechanical Testing of Microelectromechanical Devices

A method of electromechanical testing has been proposed for general diagnosis, evaluation of performance, and burn-in (accelerated life testing) of microelectromechanical devices. The tests would ordinarily be performed at the wafer level; that is, after the devices have been fabricated...

Briefs: Materials
Nonevaporable Getters To Maintain Vacuum in Sealed MEMS

Nonevaporable getters have been proposed for use in maintaining vacuum inside hermetically sealed microelectromechanical systems (MEMS) that rely on vacuum for proper operation. A vibratory microgyroscope is an example of such a MEMS. The proposed getters could also be used in such vacuum...

Briefs: Materials

A process for the fabrication of a polycrystalline diamond membrane involves chemical vapor deposition (CVD) of diamond onto a silicon substrate, followed by conventional...

Briefs: Electronics & Computers
Snapshot CCD Camera With Microelectromechanical Shutter

A proposed charge-coupled-device (CCD) camera would be mechanically shuttered by a planar array of micromachined, electromechanically actuated shutters. This proposal has arisen as part of the solution to the problem of designing a visible/near-infrared imaging spectrometer using a...

Briefs: Robotics, Automation & Control
Ceramic Hybrid Electromechanical Systems

Ceramic hybrid electromechanical systems (CHEMS) have been proposed to overcome some of the disadvantages while retaining most of the advantages of microelectromechanical systems (MEMS). Whereas MEMS are fabricated mostly by micromachining of silicon and have typical feature sizes of the order of microns...

Briefs: Motion Control

A surface-micromachining process has been devised for use in fabricating microscopic polycrystalline diamond structures (e.g., bridges and cantilevers) as integral...

Briefs: Electronics & Computers

Integrated-circuit image sensors of a proposed type would be capable of operation in either the wavelength band of 0.5 to 2.5 *m, the wavelength band of 2.8 to 5.8 *m, or both bands simultaneously....

Briefs: Test & Measurement

A micromachined force-balance anemometer has been developed by modifying the design of a micromachined force-balance accelerometer that responds to accelerations as small as 109 × normal...

Briefs: Mechanical & Fluid Systems

Magnetostatic switches — switches that open or close in response to magnetic fields — are being developed and fabricated using micromachining (MEMS) technology. These switches operate similarly to...

Briefs: Photonics/Optics

As currently practiced, packaging of individual optoelectronic components accounts for 40-50 percent of product cost. The development of higher-volume, lower-cost optoelectronic...

Briefs: Motion Control

A design has been developed for manufacturing multispeed transmissions that are small enough to be used with minimotors - electromagnetic motors with power ratings of less than 1 W. Like...

Briefs: Robotics, Automation & Control
Micromachined Monopropellant Thrusters

A report proposes monopropellant microthrusters for a new generation of miniature spacecraft with mission lifetimes stretching into years. These thrusters would include micromachined nozzle/chamber assemblies containing microvalves, designed according to emerging concepts of microelectromechanical systems...

Briefs: Materials

A technique of gentle, highly selective gas-phase etching of silicon has been devised to enable the fabrication of microelectromechanical devices integrated with electronic circuits. For...

Top Stories

Blog: Electronics & Computers

Low-Cost, High-Energy Battery Could Change the Decarbonization Game

INSIDER: Electronics & Computers

Diamond Transistors

Blog: Robotics, Automation & Control

10 VR/AR Technologies from CES 2023

INSIDER: Imaging

NIF Laser Systems Chief Engineer to Discuss Historic Fusion Ignition...

Blog: Test & Measurement

Adding Vibrations to Electronics to Reduce Vibrations

Quiz: RF & Microwave Electronics

What Exactly is LiDAR?