Aradiation-hard, 130-Volt, 100-KHz capable, quad-channel operational amplifier with corresponding power supply and 6th-order Bessel filter circuitry has been designed, fabricated, and successfully tested. To control two-axis microelectromechanical systems (MEMS)-based mirrors, a...

High-aspect-ratio silicon structures are necessary components in many MEMS (microelectromechanical systems). Aspect ratio is defined as the ratio of the height of the structure to its lateral width. The structures are typically fabricated through bulk micromachining...

Radio frequency (RF) microelectromechanical system (MEMS) switches have advantages over their solid-state counterparts. However, ohmic contact MEMS devices face several significant limitations, preventing entry into the mass market. These limitations are cost, reliability, packaging, and...

A microelectromechanical system (MEMS) glow discharge plasma electron and ion source (GDEIS) was designed for operation in high-pressure environments such as planetary atmospheres for mass spectroscopy. Glow discharge electron/ ion sources create electrons and ions from gas molecules in an...

A MEMS (microelectromechanical systems) micro-translation stage (MTS) with large linear travel capability was developed that uses capacitive electrostatic forces created by stators arranged linearly on both sides of a channel, and matching rotors on a moveable shuttle for precise...

High-performance inertial sensors, such as ring laser gyroscopes or fiber optic gyroscopes, have sufficient performance to enable “dead reckoning” navigation for adequate periods of time. Smaller microelectromechanical system (MEMS) inertial sensors, such as MEMS gyroscopes and MEMS...

Some vehicles use an internal measurement unit (IMU) system to determine the speed, acceleration, orientation, position, and/or direction of movement of the vehicle. Vehicles used for high-availability or life-critical systems may employ a fault-tolerant IMU design. Typically, such vehicles use three or more IMUs...

This innovation is a system for gas sensing that includes an ultra-low-power MEMS (microelectromechanical system) gas sensor, combined with unique electronic circuitry and a proprietary algorithm for operating the sensor. The electronics were created from scratch, and represent a novel design capable of...

A next-generation microshutter array, LArge Microshutter Array (LAMA), was developed as a multi-object field selector. LAMA consists of small-scaled microshutter arrays that can be combined to form large-scale microshutter array mosaics. Microshutter actuation is...

Previous robotic sample return missions lacked in situ sample verification/quantity measurement instruments. Therefore, the outcome of the mission remained unclear until spacecraft return. In situ sample verification systems such as this Distributed Capacitive (DisC) sensor would enable...

A microshutter array (MSA) has been developed for use as an aperture array for multi-object selections in James Webb Space Telescope (JWST) technology. Light shields, molybdenum nitride (MoN) coating on shutters, and aluminum/ aluminum oxide coatings on interior walls are put on each shutter...

One of the last remaining technical hurdles with variable emittance devices or skins based on conducting polymer electrochromics is the high solar absorptance of their top surfaces. This high solar absorptance causes overheating of the skin when facing...