Patterned Ferroelectric Films for Tunable Microwave Devices
John H. Glenn Research Center, Cleveland, Ohio
Tuesday, January 01 2008
Microwave performance is enhanced by appropriate patterning.
Tunable microwave devices based on metal terminals connected by thin ferroelectric films (see Figure 1) can be made to perform better by patterning the films to include suitably dimensioned, positioned, and oriented constrictions. The patterns (see Figure 2) can be formed during fabrication by means of selective etching processes.
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