A vacuum compressor has been designed to compress CO2 from ˜1 psia (˜6.9 kPa absolute pressure) to ˜75 psia (˜0.52 MPa), to be insensitive to moisture, to have a long operational life, and to be lightweight, compact, and efficient. The compressor consists mainly of (1) a compression head that includes hydraulic diaphragms, a gas-compression diaphragm, and check valves; and (2) oscillating linear drive that includes a linear motor and a drive spring, through which compression force is applied to the hydraulic diaphragms. The motor is driven at the resonance vibrational frequency of the motor/spring/compression-head system, the compression head acting as a damper that takes energy out of the oscillation. The net effect of the oscillation is to cause cyclic expansion and contraction of the gas-compression diaphragm, and, hence, of the volume bounded by this diaphragm. One-way check valves admit gas into this volume from the low-pressure side during expansion and allow the gas to flow out to the high-pressure side during contraction. Fatigue data and the results of diaphragm stress calculations have been interpreted as signifying that the compressor can be expected to have an operational life of >30 years with a confidence level of 99.9 percent.