An optical alignment mirror mechanism (AMM) has been developed with angular positioning accuracy of ±0.2 arcsec. This requires the mirror’s linear positioning actuators to have positioning resolutions of ±112 nm to enable the mirror to meet the angular tip/tilt accuracy requirement. Demonstrated capabilities are ±0.1 arc-sec angular mirror positioning accuracy, which translates into linear positioning resolutions at the actuator of ±50 nm.