Nanoprecise Distance and Thickness Measurements

The white light interferoMETERs are optimized for industrial use and enable measurements of the smallest details such as structures on semiconductors and electronic components. The compact design allows easy integration in tight spaces. For easy sensor positioning the systems are equipped with a patented pilot laser. The interferoMETERs are perfectly suited for distance and thickness measurements in clean rooms or under ultra-high vacuum as well as in industrial environments. The application possibilities interferometers are numerous and can be found wherever very high precision in distance or thickness measurement is required.

Additional Features

  • Absolute distance measurement with nanometer accuracy
  • Precise thickness measurements independent of the distance from the sensor
  • Multi-peak distance measurement and multi-layer thickness measurement
  • Best-in-Class: Resolution 30 picometers