HORIBA Jobin Yvon (Edison, NJ) offers the DigiScreen spectroscopic reflectometer capable of measuring film thickness deposited on a large-area glass substrate in less than one second. With a spectral range of 400 nm to 800 nm, the DigiScreen can measure film thickness from 100 nm to several microns, and accepts sample sizes up to 2.5 × 2.7 m. The sample is manually loaded on a vertical, large-area motorized stage tilted at an angle of 10°. A Quartz Tungsten Halogen (QTH) light source coupled to an optical fiber is focused onto the sample, giving a spot size of 2 mm in diameter. A second optical fiber collects the light reflected from the sample. A 2048-pixel CCD coupled with a spectrograph measures the reflectance of the sample. The system can characterize materials such as SiN, SiON, a-Si(n+), a-Si (HDR, LDR), LTPS, c-Si, Silane-based SiOx, and TEOS.

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Photonics Tech Briefs Magazine

This article first appeared in the October, 2006 issue of Photonics Tech Briefs Magazine (Vol. 30 No. 10).

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