Edwards (Crawley, West Sussex, UK) has introduced the new iXH645H dry pump. The new pump has been optimized for MOCVD processes used in LED manufacturing, as well as for compound semiconductor manufacturing using III-V materials in gate stacks. The iXH645H delivers very high gas flow capability and is able to operate continuously at the high loads required for the latest-generation LED manufacturing tools.
Both LED and compound semiconductor manufacturing processes typically use high flows of light hydrogen and highly-corrosive ammonia gasses. The iXH645H has been optimized to support these requirements with superior hydrogen pumping performance and a corrosion-resistant design, including a patented nitrogen purge barrier to protect the pump seals.
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