Zygo Corporation (Middlefield, CT) has introduced the ZeGage™ Plus optical profiler, a full-featured instrument for the 3D measurement of surface topography and roughness. The ZeGage Plus utilizes ZYGO’s proprietary Mx™ software, for enhanced data visualization and quantification of step heights, texture, and volumetric applications. ZeGage Plus profilers with optional automated XY sample stages have the added ability to combine overlapping measurements for the characterization of larger areas. Many of ZYGO’s extensive list of parfocal objectives can be used with ZeGage Plus profilers, from 1.4X to 50X, as well as 1X to 10X long working distance, and a 5X super- long working distance lens.
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