Prober Assistant Measurement System (PAMS) is a computer program that automates the time-consuming process of testing microfabricated devices (integrated circuits and/or microelectromechanical systems) at the wafer level. PAMS was written specifically for use with the Karl Suss probe station (a commercially available wafer-testing apparatus) and is compatible with associated testing circuitry that conforms to the IEEE 488 general-purpose interface bus (GPIB) standard. Manual wafer testing is tedious and susceptible to error because the process involves controlling the probe station to position the probe leads on each device, configuring the associated testing equipment, and recording the measurement data. In contrast, PAMS automatically positions the probe leads according to a wafer map and automatically performs the measurement and recording steps. Multiple devices on a wafer can be tested simultaneously, or multiple measurements can be made on a single device. Acquired data can be displayed on a screen and/or recorded in a file. At present, PAMS is executed on a computer based on a Pentium II processor with a clock rate of 400 MHz, 128MB of random-access memory, and 6GB of hard-disk storage, and running the Windows NT operating system.
This program was written by Christopher Evans of Caltech for NASA's Jet Propulsion Laboratory. For further information, access the Technical Support Package (TSP) free on-line at www.nasatech.com/tsp under the Software category.
This software is available for commercial licensing. Please contact Don Hart of the California Institute of Technology at (818) 393-3425. Refer to NPO-20850.
This Brief includes a Technical Support Package (TSP).
Software for Wafer-Level Testing of Microfabricated Devices
(reference NPO-20850) is currently available for download from the TSP library.
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Overview
The document is a technical support package for the Prober Assistant Measurement System (PAMS), developed by Christopher B. Evans at the Jet Propulsion Laboratory (JPL) under NASA's auspices. The current version of the software, as of September 10, 1999, is version 1.11. PAMS is designed to facilitate wafer-level testing of microfabricated devices, which is crucial in the development and production of integrated circuits and microelectromechanical systems (MEMS).
The document outlines several key components of the PAMS project, including a problem statement, vision statement, and solution concept. It emphasizes the need for an efficient testing system that can handle the complexities of modern microfabrication processes. The vision for PAMS is to create a user-friendly interface that simplifies the testing workflow, allowing engineers to focus on analysis rather than manual testing procedures.
The user interface is highlighted as a critical aspect of the software, designed to be intuitive and accessible for users with varying levels of technical expertise. The document also includes a program flow chart, which illustrates the operational sequence of the software, ensuring that users can understand how to navigate through the testing process effectively.
Additionally, the document provides a system block diagram and outlines program requirements, detailing the necessary resources and technical specifications needed for successful implementation. This includes compatibility with the Karl Suss probe station, which is a widely used tool in the semiconductor industry for probing and testing microfabricated devices.
The technical support package also includes a disclaimer stating that neither NASA nor any associated parties make warranties regarding the accuracy or completeness of the information provided, nor do they assume liability for any damages resulting from the use of the disclosed methods or processes.
Overall, the PAMS project represents a significant advancement in the field of microfabrication testing, aiming to improve the efficiency and reliability of testing procedures. By automating various aspects of the testing process, PAMS is positioned to enhance productivity and accuracy in the evaluation of microfabricated devices, ultimately contributing to advancements in technology and engineering within the aerospace and semiconductor industries.
